Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256095 | Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system | Soo Doo Chae, Noel Russell, Nicholas Joy, Luis Fernandez, Allen J. Leith +3 more | 2019-04-09 |