Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381227 | Methods of atomic layer etching (ALE) using sequential, self-limiting thermal reactions | Younghee Lee | 2019-08-13 |
| 10283354 | Methods of growing thin films at low temperatures using electron stimulated desorption (ESD) | Andrew S. Cavanagh | 2019-05-07 |
| 10208383 | Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination | Younghee Lee, Nicholas Johnson | 2019-02-19 |