Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10208383 | Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination | Steven M. George, Younghee Lee | 2019-02-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10208383 | Atomic layer etching processes using sequential, self-limiting thermal reactions comprising oxidation and fluorination | Steven M. George, Younghee Lee | 2019-02-19 |