Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514613 | Pattern modification and patterning process | Shih-Ming Chang, Ru-Gun Liu, Chien-Wen Lai, Zengqin Zhao | 2019-12-24 |
| 10417376 | Source beam optimization method for improving lithography printability | Hsu-Ting Huang, Ru-Gun Liu | 2019-09-17 |