Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495967 | Method of mask simulation model for OPC and mask making | Chih-Shiang Chou, Ru-Gun Liu | 2019-12-03 |
| 10417376 | Source beam optimization method for improving lithography printability | Shuo-Yen Chou, Ru-Gun Liu | 2019-09-17 |