Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328549 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang, Jung-Yu Li | 2019-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328549 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang, Jung-Yu Li | 2019-06-25 |