Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328549 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Shu-Bin Hsu, Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang | 2019-06-25 |
| 10171735 | Panoramic vision system | Shih-Pu Chen, Yi-Ping Lin | 2019-01-01 |