Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Chien-Wen Hsiao, Tzu-Yang Chung, Shang-Yuan Yu, Wagner Chang | 2019-12-17 |
| 10497557 | Integrated platform for improved wafer manufacturing quality | Tsai-Pao Su, Wen-Chang Tsai, Chia-Wen Li, Yu-Yen Hsu | 2019-12-03 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Jui-Chuan Chang, Wen-Chang Tsai, Shang-Yuan Yu, Chien-Wen Hsiao, Fan-Yi Hsu | 2019-11-26 |
| 10276469 | Method for forming semiconductor device structure | Weibo Yu, Jui-Ping Chuang, Chen-Hsiang Lu | 2019-04-30 |