Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Chien-Wen Hsiao, Shao-Yen Ku, Tzu-Yang Chung, Wagner Chang | 2019-12-17 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Jui-Chuan Chang, Shao-Yen Ku, Wen-Chang Tsai, Chien-Wen Hsiao, Fan-Yi Hsu | 2019-11-26 |