Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510516 | Moving focus ring for plasma etcher | Yu-Chi Lin, Yi-Wei Chiu, Chin-Hsing Lin | 2019-12-17 |
| 10504738 | Focus ring for plasma etcher | Yu-Chi Lin, Chin-Hsing Lin, Yi-Wei Chiu, Yu-Wei Kuo, Yu Lun Ke | 2019-12-10 |
| 10190906 | Light sensor sensing illumination of a partial area | Chieh-Hsin Kuo, Ting-Fu Hsu, Wei-Che Lee | 2019-01-29 |