Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510516 | Moving focus ring for plasma etcher | Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang | 2019-12-17 |
| 10504738 | Focus ring for plasma etcher | Yu-Chi Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo, Yu Lun Ke | 2019-12-10 |