Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504760 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Sheng-Kang Yu, Chi-Feng Tung, Guancyun Li | 2019-12-10 |
| 10403532 | Semiconductor apparatus with inner wafer carrier buffer and method | Jason Shen, Wen-Yu Huang, Li-Jen Ko | 2019-09-03 |