Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10499876 | Test key design to enable X-ray scatterometry measurement | Shyh-Shin Ferng, Yi-Hung Lin, Chungwei Wang | 2019-12-10 |
| 10361286 | Method and structure for mandrel and spacer patterning | Chi-Che Tseng, Chen-Yuan Wang, Wilson Chang-Yi Hsieh, Yi-Hung Lin | 2019-07-23 |