Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10273152 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Jr-Sheng Chen, Chih-Hsien Hsu, Yu-Pei Chiang, Lin-Ching Huang | 2019-04-30 |