Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283456 | Lithography engraving machine for forming water identification marks and aligment marks | Hu-Wei Lin, Yu-Wei Chiu, Hai-Yin Chen, Ying-Hao Wang, Yu-Hen Wu | 2019-05-07 |
| 10283457 | Method for lithographically forming wafer identification marks and alignment marks | Hu-Wei Lin, Yu-Wei Chiu, Hai-Yin Chen, Ying-Hao Wang, Yu-Hen Wu | 2019-05-07 |
| 10273152 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Chin-Han Meng, Jr-Sheng Chen, Yu-Pei Chiang, Lin-Ching Huang | 2019-04-30 |