Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345692 | Photomask and a fabrication method therefor | Chun-Lang Chen, Shih-Hao Yang | 2019-07-09 |
| 10345695 | Extreme ultraviolet alignment marks | Yi-Fu Hsieh, Jong-Yuh Chang, Hsin-Chang Lee | 2019-07-09 |
| 10274817 | Mask and photolithography system | Ching-Hung Lai, Chih-Chung Huang, Chung-Hung Lin, Chi-Ming Tsai, Ming-Ho Tsai | 2019-04-30 |
| 10276426 | System and method for performing spin dry etching | Chun-Lang Chen | 2019-04-30 |