Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10521541 | Method and structure for mandrel and spacer patterning | Chung-Ming Wang, Chih-Hsiung Peng, Kuei-Shun Chen, Shih-Chi Fu | 2019-12-31 |
| 10515953 | Method and structure for gap filling improvement | Ying-Hao Su, Yu-Chung Su, Yu-Lun Liu, Chia-Chu Liu, Kuei-Shun Chen | 2019-12-24 |
| 10204867 | Semiconductor metrology target and manufacturing method thereof | Long Chen, Jia-Hong Chu, Hsin-Chin LIN, Hsiang-Yu SU, Yun-Heng Tseng +4 more | 2019-02-12 |