Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508333 | Heating apparatus and substrate processing apparatus having the same | Byeong-Hoon Kim, Byung-Hwan Kong, Sung-Han Lee, Sun-Ok Cho, Seung Hwan KANG +1 more | 2019-12-17 |