Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508333 | Heating apparatus and substrate processing apparatus having the same | Byeong-Hoon Kim, Byung-Hwan Kong, Sun-Ok Cho, Seung Hwan KANG, Seung Ho Lee +1 more | 2019-12-17 |
| 10447782 | Slave device control method | — | 2019-10-15 |
| 10277502 | Slave device control method | Ji-Geon Lee | 2019-04-30 |
| 10237018 | Communication device and communication method | Dae Hyun Kwon, Joon Seok Oh | 2019-03-19 |