Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519566 | Wafer support, chemical vapor phase growth device, epitaxial wafer and manufacturing method thereof | Daisuke Muto | 2019-12-31 |
| 10494737 | Apparatus for producing SiC epitaxial wafer and method for producing SiC epitaxial wafer | Akira Miyasaka, Yoshiaki Kageshima | 2019-12-03 |
| 10208398 | Wafer support, chemical vapor phase growth device, epitaxial wafer and manufacturing method thereof | Daisuke Muto | 2019-02-19 |