Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494737 | Apparatus for producing SiC epitaxial wafer and method for producing SiC epitaxial wafer | Jun Norimatsu, Yoshiaki Kageshima | 2019-12-03 |
| 10176987 | SiC epitaxial wafer and method for manufacturing the same | Yutaka Tajima, Yoshiaki Kageshima, Daisuke Muto, Kenji Momose | 2019-01-08 |