Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464189 | Method for manufacturing polishing head, polishing head, and polishing apparatus | Masaaki OSEKI | 2019-11-05 |
| 10414017 | Polishing apparatus | Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Yosuke KANAI, Yuya Nakanishi | 2019-09-17 |
| 10300576 | Polishing method | Masaaki OSEKI, Kaoru Ishii | 2019-05-28 |
| 10201886 | Polishing pad and method for manufacturing the same | Junichi Ueno, Kaoru Ishii, Yoshihide Kawamura, Hiroshi Yoshida, Masataka Takagi | 2019-02-12 |