Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464189 | Method for manufacturing polishing head, polishing head, and polishing apparatus | Michito Sato | 2019-11-05 |
| 10300576 | Polishing method | Michito Sato, Kaoru Ishii | 2019-05-28 |