Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10377842 | Polymer, negative resist composition, and pattern forming process | Jun Hatakeyama | 2019-08-13 |
| 10345700 | Negative-tone resist compositions and multifunctional polymers therein | Luisa D. Bozano, Yoshio Kawai, Keiichi Masunaga, Martha I. Sanchez, Daniel P. Sanders +3 more | 2019-07-09 |
| 10191372 | Polymer, positive resist composition, and pattern forming process | Jun Hatakeyama | 2019-01-29 |