Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199243 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Hiroki Tsujikawa, Yuya Tsuchihashi, Akihiko TAKI | 2019-02-05 |
| 10186435 | Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing system | Hidekazu ISHIKAWA | 2019-01-22 |