Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199243 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Atsuyasu Miura, Hiroki Tsujikawa, Yuya Tsuchihashi | 2019-02-05 |
| 10192771 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Hiromichi KABA | 2019-01-29 |