Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170324 | Technique to tune sidewall passivation deposition conformality for high aspect ratio cylinder etch | Nikhil Dole, Eric A. Hudson | 2019-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170324 | Technique to tune sidewall passivation deposition conformality for high aspect ratio cylinder etch | Nikhil Dole, Eric A. Hudson | 2019-01-01 |