Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468264 | Method of fabricating semiconductor device | Jae-Soon Lim, Gyu-hee Park, Hyun Suk Lee, Gi-hee Cho | 2019-11-05 |
| 10361118 | Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same | Chang-Woo Sun, Ji-Eun Yun, Jae-Soon Lim, Myong Woon Kim, Kang-Yong Lee +2 more | 2019-07-23 |
| 10329312 | Lanthanum compound, method of synthesizing lanthanum compound, lanthanum precursor composition, method of forming thin film, and method of manufacturing integrated circuit device | Gyu-hee Park, Youn Soo Kim, Jae-Soon Lim, Haruyoshi Sato, Naoki Yamada +1 more | 2019-06-25 |
| 10319590 | Method of forming semiconductor device using metal-containing hardmask to pattern photoresist having protected polymer | Cha-won Ko, Hyun-Woo Kim, Jin-Kyu Han | 2019-06-11 |
| 10259836 | Methods of forming thin film and fabricating integrated circuit device using niobium compound | Jae-Soon Lim, Gyu-hee Park, Clement Lansalot, Won-tae Noh, Julien Lieffrig +1 more | 2019-04-16 |
| 10242877 | Aluminum compound and methods of forming thin film and fabricating integrated circuit device by using the same | Gyu-hee Park, Jae-Soon Lim | 2019-03-26 |
| 10224200 | Aluminum compound, method of forming thin film by using the same, and method of fabricating integrated circuit device | Gyu-hee Park, Jae-Soon Lim, Myong Woon Kim, Sang Ick Lee, Sung-duck Lee +1 more | 2019-03-05 |