Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224200 | Aluminum compound, method of forming thin film by using the same, and method of fabricating integrated circuit device | Gyu-hee Park, Jae-Soon Lim, Youn-Joung Cho, Myong Woon Kim, Sang Ick Lee +1 more | 2019-03-05 |