Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410937 | Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement | Jang-Ik Park, Bong Seok Kim, Yu-Sin Yang, Soo Seok Lee | 2019-09-10 |
| 10373796 | Method of inspecting wafer using electron beam | Chung-Sam Jun, Woo-Seok Ko, Sang-Kil Lee, Kwang Il Shin, Yu-Sin Yang +1 more | 2019-08-06 |