Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497597 | Electrostatic chuck assembly and substrate processing apparatus including the same | Jaehyun Lee, Tae Hwa Kim, Minjoon Park | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497597 | Electrostatic chuck assembly and substrate processing apparatus including the same | Jaehyun Lee, Tae Hwa Kim, Minjoon Park | 2019-12-03 |