Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497597 | Electrostatic chuck assembly and substrate processing apparatus including the same | Jaehyun Lee, Sangdong Kwon, Tae Hwa Kim | 2019-12-03 |
| 10439128 | Piezoelectric device, piezoelectric sensor using the same, and wearable device having the same | Jongho Hong, Wonsang Park, Jaeik Lim, Hyeyong Chu, Dae-Hyeong Kim +2 more | 2019-10-08 |