Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474184 | Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device | Hyun Bae Kim, Young-Hwan Choi, Jin Ho Kim | 2019-11-12 |
| 10281520 | Diagnosing an abnormal state of a substrate-processing apparatus | Dae Sung Jung, Jung Hwan Um | 2019-05-07 |