Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10516388 | Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method | Hye Jin Kim, Ju Hyun Kim, Ji Hwan Kim, Chan Hee Park, Young-Hwan Choi | 2019-12-24 |
| 10474184 | Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device | Sang-Yoon Soh, Young-Hwan Choi, Jin Ho Kim | 2019-11-12 |