Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10196738 | Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system | Chang Yun Lee, Ju Hyun Lee, Kyu-Hee Han, Seung Hun Lee, Byung Chul Jeon | 2019-02-05 |