Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520354 | Apparatus and method for diagnosing rotor shaft | Byeng Dong YOUN, Joon Ha JUNG | 2019-12-31 |
| 10196738 | Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system | Chang Yun Lee, Ju Hyun Lee, Kee-soo Park, Kyu-Hee Han, Seung Hun Lee | 2019-02-05 |