Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274820 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Roman Chalykh, Yongseok Jung +1 more | 2019-04-30 |