Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10316835 | Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus | Jun Yamashima, Shinichiro Hayasaka, Toshihiro TSURUTA, Hiroshi Fujii, Junichi Akiba +1 more | 2019-06-11 |