Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444623 | Method and system for high-throughput defect inspection using the contrast in the reduced spatial frequency domain | — | 2019-10-15 |
| 10201066 | Compact light source for metrology applications in the EUV range | Leonid Rivkin, Albin Wrulich, Andreas Streun | 2019-02-05 |