Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10201066 | Compact light source for metrology applications in the EUV range | Yasin Ekinci, Albin Wrulich, Andreas Streun | 2019-02-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10201066 | Compact light source for metrology applications in the EUV range | Yasin Ekinci, Albin Wrulich, Andreas Streun | 2019-02-05 |