Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483087 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Kei Hasegawa, Hayato Kimura | 2019-11-19 |
| 10248031 | Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method | Yasuo Kato | 2019-04-02 |