Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483087 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Kei Hasegawa, Ryoh KAWANA | 2019-11-19 |
| 10475621 | Drawing device and drawing method | Kei Hasegawa, Hideo Inoue, Yoshiaki Onimaru | 2019-11-12 |