Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481112 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2019-11-19 |
| 10403489 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2019-09-03 |