Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481112 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2019-11-19 |