Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509320 | Underlying coating forming composition for lithography containing compound having protected carboxyl group | Satoshi Takei, Tetsuya Shinjo, Keisuke Hashimoto | 2019-12-17 |
| 10289002 | Electron beam resist underlayer film-forming composition containing lactone-structure-containing polymer | Ryuta MIZUOCHI, Rikimaru Sakamoto | 2019-05-14 |