Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176972 | Plasma etching apparatus comprising a nozzle oscillating unit | Yoshio Watanabe, Siry Milan, Hiroyuki Takahashi | 2019-01-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176972 | Plasma etching apparatus comprising a nozzle oscillating unit | Yoshio Watanabe, Siry Milan, Hiroyuki Takahashi | 2019-01-08 |