Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345708 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Hideki Komatsuda | 2019-07-09 |
| 10191387 | Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method | Hiroshi Chiba | 2019-01-29 |