Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459343 | Illumination device | — | 2019-10-29 |
| 10345708 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2019-07-09 |
| 10228623 | Image-forming optical system, exposure apparatus, and device producing method | — | 2019-03-12 |