Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460998 | Method for inspecting substrate, substrate inspection apparatus, exposure system, and method for producing semiconductor device | — | 2019-10-29 |
| 10352875 | Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device | Kazuhiko Fukazawa | 2019-07-16 |