Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359367 | Inspection apparatus and inspection method | — | 2019-07-23 |
| 10352875 | Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device | Yoshihiko Fujimori | 2019-07-16 |
| 10274835 | Evaluation method and device, processing method, and exposure system | — | 2019-04-30 |